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发明名称
WET ETCHING APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20070046300(A)
申请公布日期
2007.05.03
申请号
KR20050102823
申请日期
2005.10.31
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KWON, OH JEONG
分类号
H01L21/3063
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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