PIEZOELECTRIC FILM, ITS FORMING METHOD, AND PIEZOELECTRIC ACTUATOR, INK JET HEAD AND INK JET RECORDING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a piezoelectric film 23 having excellent piezoelectric characteristic by improving more crystal growth when a piezoelectric material film is formed on a substrate 41 and subjected to annealing treatment. SOLUTION: A centrifugal force is applied to a substrate 41, in the thickness direction of the substrate 41, by rotating a substrate retaining member 62 by using a carousel sputtering equipment 61. A process wherein a piezoelectric material film is formed and subjected to annealing treatment is repeated a plurality of times.