Fluid ejection device having an elongate micro-electromechanical actuator

摘要

A micro-electromechanical fluid ejection device includes a substrate that defines a fluid inlet channel and incorporates a wafer and CMOS layers positioned on the wafer. A nozzle chamber sidewall and roof are positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet channel and a fluid ejection port in the roof, in fluid communication with the nozzle chamber. An elongate actuator is anchored at a proximal end portion to the substrate to receive electrical drive signals from the CMOS layers and extends through the sidewall. The elongate actuator is configured to be displaced on receipt of said drive signals. A fluid ejecting member is positioned in the nozzle chamber and is fast with a distal end portion of the actuator such that displacement of the actuator results in movement of the fluid ejecting member, thereby ejecting fluid from the fluid ejecting port. The distal end portion of the actuator has an enlarged face. The sidewall extends behind the face to define a slot through which the arm extends so that the face is positioned in the nozzle chamber and the roof defines a slot to accommodate reciprocal movement of the face.