Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

摘要

A spatial light modulator has an array of reflective surfaces of deflectable mirror plates. For improving the reflectivity of the mirror plates, layers that are preferably transmissive to visible light are provided on the reflective surfaces of the mirror plates. The layers may have different thicknesses and/or refractive indices to the visible light to optimize the reflectivity of the mirror plates.