| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing machine and its transport tool capable of reducing cost and time for replacement of stages and flexibly performing polishing processes to substrates in various sizes. SOLUTION: The transport tool 102 loading an article 106 to be transported thereon comprises a center platform 108, a first tray 110 secondarily supporting the article 106 to be transported, and a second tray 112 secondarily supporting the article 106 to be transported. The first tray 110 and the second tray 112 are respectively placed on both sides of the center platform 108. Sides of the respective trays adjacent to the center platform 108 correspond to each other to form a complementary structure. The first tray 110 and the second tray 112 are relatively moved and adjusted to secondarily support the article 106 to be transported. COPYRIGHT: (C)2009,JPO&INPIT
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