SILICON WAFER EDGE PROTECTION DEVICE

摘要

A silicon wafer edge protection device, comprising: a horizontal motion assembly; a vertical motion assembly (1); a speed regulating device (20), which is in signal connection with the vertical motion assembly (1) and is used for regulating the motion speed of the vertical motion assembly (1); a flexible anti-collision assembly, which is connected to the horizontal motion assembly and the vertical motion assembly (1) and is used for reducing the amplitude of vibration of the silicon wafer edge protection device when a collision occurs; and a control device, which is in signal connection with the speed regulating device (20) and is used for sending a control signal to the speed regulating device (20) so as to control the motion of the vertical motion assembly (1). The silicon wafer edge protection device can prevent a workbench from undergoing an instantaneous strong impact and prevent a silicon wafer from being crushed up. When a collision occurs, the workbench and the silicon wafer can be protected. In addition, the production efficiency is improved.