| 摘要 |
PROBLEM TO BE SOLVED: To inhibit particles from a ball screw for moving a transfer mechanism vertically from being scattered while suppressing the largeness of a device and a deterioration of a throughput during transferring many base plates to a base plate holding tool by the transfer mechanism.SOLUTION: A gas supply part 34 and a gas collection duct 36 are arranged so as to face each other through areas 10a, 10b such that gas flow of laminar flow is formed to an area with a ball screw 4 for moving an arm 3 vertically. A local exhaust duct 50 is arranged on a downstream side of the gas flow and formed so as to go along the length direction of the ball screw 4 and so as to turn toward the ball screw 4 with respect to a gas suction part 53. Then, a changeover valve 60 for switching the gas collection duct 36 and the local exhaust duct 50 are provided to close the gas collection duct 36 when the arm 3 is driven, earning the flow rate of air flow that takes a roundabout path of a local exhaust duct 50 side. |
