Method for fabricating a magnetic write pole having an improved sidewall angle profile

摘要

A method provides a magnetic device having an air-bearing surface (ABS) location. A layer including first and second sublayers is provided. The first sublayer includes the ABS location. The second sublayer recessed from the ABS location such that part of the first sublayer is between the second sublayer and the ABS location. The first sublayer has a rear surface oriented at a nonzero, acute angle from a surface perpendicular to the ABS location. A trench is formed in the layer. The trench has a bottom, a top and sidewalls. The sidewalls form a first angle with a direction perpendicular to the bottom at the ABS location. The sidewalls form a second angle with the direction in part of the second sublayer. The second angle is smaller than the first angle. The sidewall angle varies along the rear surface of the first sublayer. A main pole is provided in the trench.

主权项

1. A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:
providing an intermediate including a first sublayer and a second sublayer in at least a main pole region, the first sublayer including the ABS location, the second sublayer recessed from the ABS location such that a portion of the first sublayer is between the second sublayer and the ABS location, the first sublayer having a rear surface at an angle of greater than zero degrees and less than ninety degrees from a surface perpendicular to the ABS location; forming a trench in the intermediate layer, the trench having a bottom, a top and a plurality of sidewalls, the plurality of sidewalls forming a first angle with a direction perpendicular to the bottom at the ABS location, the plurality of sidewalls forming a second angle with the direction perpendicular to the bottom in a portion of the second sublayer, a sidewall angle between the plurality of sidewalls and the direction perpendicular to the bottom varying along the rear surface of the first sublayer, the second angle being smaller than the first angle; and providing a main pole in the trench.