发明名称 Method and system for emitter partitioning for SiGe RF power transistors
摘要 A power transistor includes a plurality of emitter regions and a plurality of base contacts. In order to decrease base resistance, each of the plurality of emitter regions is adjacent to at least four base contacts. The entire transistor includes multiple emitter regions, e.g., greater than or equal to about 1,000 with no upper limit wherein the actual number of emitter regions is dependent on the desired current carrying capacity. The emitter regions are directly connected in parallel to the high current carrying metal layer of the transistor through vias or metal contact studs. The size of the emitter regions should be made as small as the process design rules will allow in order to allow an increase in the perimeter to area ratio of the emitter region which, for a given current, decreases the peak current density.
申请公布号 US2001009794(A1) 申请公布日期 2001.07.26
申请号 US20010801701 申请日期 2001.03.09
申请人 TILLY LARS;BRANDT PER-OLOF MAGNUS 发明人 TILLY LARS;BRANDT PER-OLOF MAGNUS
分类号 H01L21/331;H01L29/08;H01L29/732;H01L29/737;(IPC1-7):H01L21/331;H01L21/822;H01L27/082 主分类号 H01L21/331
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