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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH01308017(A)
申请公布日期
1989.12.12
申请号
JP19880138450
申请日期
1988.06.07
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOSHIRAKAWA NOBUTAKA
分类号
C23C14/22;C23C14/24;H01L21/203
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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