| 摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid crystal display panel formed by using a polycrystalline ITO(indium tin oxide) as a protective film for a hydrofluoric acid based etchant. SOLUTION: Plural electrodes 104 composed of metals, for example, gate electrodes, are formed on the substrate of the liquid crystal display panel. Insulating films are formed on these plural electrodes and, further, the polycrystalline ITO film 116 having a crystal structure of a cubic bixbyte type for protecting the plural electrodes 104 against the hydrofluoric acid based etchant is formed on these insulating films. |
