| 摘要 |
<p>PURPOSE:To prevent a sealed trace from being left on the rear surface of a glass substrate while suppressing the deformation of the glass substrate when the glass substrate, etc., is sucked at the spinner chuck through the intermediary of a seal rings. CONSTITUTION:An inner seal ring 5 and an outer seal ring 6 are concentrically provided on the surface of a flat plate part 2 of the spinner chuck 1 while suction holes 7 connecting to a vacuum pump are perforated on the central point of the flat plate part inside the inner seal ring 5 as well as in the parts between the inner sealing ring 5 and the outer ring 6. On the other hand, the inner sealing ring 5 and the outer ring 6 are dual-structured comprising a rubber core and a surface layer made of fluoro-ethylene tetrafluoride.</p> |
