DISCHARGE EXCITATION TYPE EXCIMER LASER

摘要

PURPOSE:To make it possible to remove easily sputter particles generated by the discharge of an electrode without any need to disassemble and clean a device. CONSTITUTION:Clamping a heat exchanger 5 installed in a laser chamber, a spray nozzle is installed to one side so as to spray purge gas at the heat exchanger 5. On the other hand, a suction nozzle is installed to the other side so as to suck up purge gas. The sputter particles deposited on the heat exchanger 5 are blown off by the purge gas sprayed by the heat exchanger 5. The blown off sputter particles are sucked up from the suction nozzle and discharged outside from the laser chamber 1.