发明名称 SYSTEM FOR CONTROLLING FLOW THROUGH A PROCESS REGION
摘要 A regulator for maintaining a constant partial vacuum in a region includes a path, through which fluid passes from the region to a vacuum source, and a piston (2) movably mounted at a constriction point (30). The piston has a frontal face (15), exposed to fluid in the path upstream of the constriction point (30). A piston distal face (16), exposed to a reference pressure, such as the pressure of region and piston weight tends to widen the path at the constriction point (30). A force is exerted on the piston by a spring (21) under compression, in a direction that tends to narrow the path at the constriction point. A buffering gas, introduced to the area between the piston's skirt (29) and the piston mounting structure (65), may be used to keep fumes from backing up into the region and/or to provide a bearing.
申请公布号 WO9410618(A1) 申请公布日期 1994.05.11
申请号 WO1993US10371 申请日期 1993.10.22
申请人 PALMER, DAVID, W. 发明人 PALMER, DAVID, W.
分类号 F15B1/00;B01D53/26;B01L1/00;B08B15/02;F24F3/16;F24F7/06;F24F11/02;F24F11/047;F24F13/10;F24F13/12;F24F13/14;G05D7/01;G05D7/06;G05D16/10;G05D16/20;(IPC1-7):G05D7/03 主分类号 F15B1/00
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