| 摘要 |
PROBLEM TO BE SOLVED: To attain improvement of preparation efficiency of a process flow. SOLUTION: A process flow preparation device 200 has a condition input part 210 for holding a processing condition inputted by an input part 100, a recipe retrieval part 220 that retrieves a name of a recipe coincident to the processing condition inputted by the input part 100 from a recipe DB 40 and, when there are many results of this retrieval, further demands an input of processing condition and specifies the recipe, a process order input part 230 for holding the process order inputted by the input part 100 and holding it as the process order of the recipe, and a process flow output part 240 for outputting as the process flow the specified recipe together with information on the order to a display part 300. |
