| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the variation in a piezoelectric constant by setting a crystal orientation so that a [100] direction, [010] direction, or [001] direction of a perovskite structure may be nearly perpendicular to an electrode face. SOLUTION: In a piezoelectric element 1, a crystal orientation of PZT [=Pb(ZrXTi1- X)O3 ; lead zirconate titanate] 2 having a perovskite structure which us a cystal structure having a rhombus-shaped face is so set that a [100] direction, a [010] direction, or a [001] direction may be nearly perpendicular to the surfaces of electrodes 3a, 3b. In other words, the composition ratio of Zr to Ti in the PZT 2 is so set that a piezoelectric constant may be maximum in the [100] direction, the [010] direction, or the [001] direction, by baking the PZT 2 having a perovskite structure which is distorted to a crystal having a rhombus-shaped face at a room temperature. By this method, the variations in the piezoelectric constant can be eliminated and thereby the characteristic of the piezoelectric element 1 can be stabilized. |
