LAMINATED STRUCTURE, AND METHOD OF MANUFACTURE THEREOF

摘要

A laminated structure has a plastic or glass substrate on which is formed a sputter-deposited silicon carbide layer, the optical transmittance of which is 80 % or less. Preferably, the silicon carbide layer has a reflectivity of 10-50%, the plastic is polycarbonate, the impurity on the surface of the silicon carbide layer is less than 1.0 x 10<12> atoms/cm<2>, and the silicon carbide layer has a thickness of 15-100 nm. The laminated structure is a desirable material of recording media such as CD-ROMs and DVD-ROMs since it comprises a silicon carbide layer that is oxidation-resistant, chlorine-resistant and moisture-resistant.