Fluorescence X-ray analyzer particularly path changing device has sample base, X-ray source, monochromator, two detectors, two drive mechanisms, three spindles and a control device for controlling the drive mechanisms

摘要

The fluorescence X-ray analyzer includes a control device to control the first and second drive mechanisms in order to vary the wavelength of incidental secondary X-ray on the first detector or the light slit receiving part, and to control the wavelength of the third drive mechanism in order to direct the secondary X-ray on to second detector which has passed through the first detector or the light slit receiving part. Fluorescence X-ray analyzer has a sample base to support a sample piece; an X-ray source to release a primary X-ray to the sample on the sample base; a monochromator (6) to monochrome an emitted secondary X-ray (7) from the sample; a first detector (8A) to measure intensity of a portion of monochromed secondary X-ray (7), whilst the remaining portion is transmitted; a light slit receiving part which transmits the secondary monochromed X-ray; a second detector (8B) to measure intensity of the secondary X-ray (7) which was transmitted through the first detector or the light slit receiving part; a first spindle (14) which has a longitudinal axis and carries the monochromator (6); a first drive mechanism to drive the first spindle (14); a second spindle (17) which has an equiaxed and common longitudinal axis with the longitudinal axis of the first spindle (14) and carries the first detector as well as the light slit receiving part next to each other; a second drive mechanism to drive the second spindle (17); a third spindle (20) which has an equiaxed and common longitudinal axis with the longitudinal axis of the first spindle (14) and carries the second detector and a control device.