| 摘要 |
PROBLEM TO BE SOLVED: To improve qualitative analysis precision, quantitative analysis precision and qualitative repeatability, by removing a diffracted X-ray by a software method. SOLUTION: In this fluorescent X-ray analyzer for applying an X-ray to a sample, for detecting a fluorescent X-ray emitted from the sample by an energy dispersion type detector 11, and for measuring a content rate of an element composing the sample from detected spectrum data, an analytical processing means 12 is installed, having a fluorescent X-ray spectrum data base 13 and a diffracted X-ray spectrum data base 14, obtained by measuring a reference sample beforehand, for referring the fluorescent X-ray spectrum data base 13 and the diffracted X-ray spectrum data base 14 relative to the measured fluorescent X-ray spectrum data, and for thereby comparing and operating an overlap between each fluorescent X-ray and an overlap between the fluorescent X-ray and the diffracted X-ray to separate them, and for calculating the fluorescent X-ray spectrum.
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