| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging sensor having a micro lens that can be manufactured without damaging a function of a multiplayer antireflection film in the cleaning when it is manufactured and that decreases the surface reflection of the manufactured micro lens and improves optical convergence. SOLUTION: This multiplayer antireflection film is sequentially provided with a light receiving part flatness film 16, a color filter film 7, a micro lens film 8, and an antireflection film 9 on the upper part of a light receiving part 10 and consists of two films or more in which the antireflection film alternately laminates a high refractive index film and a low refractive index film. When the thickness of the multiplayer antireflection film is D and the clearance of the micro lens film is L, D is greater than or equal to L/2. The high refractive index film must be cerium oxide or a mixture of cerium oxide and another metal oxide.
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