ALIGNER, METHOD OF MANUFACTURING ALIGNER AND METHOD OF MANUFACTURING MICRO-DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an aligner which can measure an amount of light applied on a photosensitive substrate through a projection optical system rapidly and accurately and can adjust a light amount highly precisely and rapidly based on the measurement result even after the aligner is manufactured, and a manufacturing method of the same. SOLUTION: A space image measurement device 24 for measuring an amount of light applied on a plate P through each of projection optical system units PL1 and PL5 constituting a projection optical system PL and a dimming filter 7 for dimming light from a light source 1 during measurement using the space image measurement device 24 are provided. Dimming filters 13b to 13f and variable dimming filters 14b to 14f for adjusting a dispersion in the amount of light via each of the projection optical system units PL1 to PL5 are provided between each of projection ends 11b to 11f of a light guide 11 and a mask M.