| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a micro-hand which applies micro-operating force to a sample under electron beams in a vacuum of an electron microscope while ensuring vibration-isolation and suppressing outgassing. <P>SOLUTION: The micro-hand 10 can apply a minute operating force to the sample 30 in a vacuum sample chamber 2 by means of a single or a plurality of finger pieces 15, 16. The locations of the finger pieces 15, 16 in the sample chamber are adjustable by a movable holder 10B. The finger pieces 15, 16 are driven by lead wires 24, 26 for supplying power and detecting electric signals, and the lead wires are drawn from the sample chamber via an airtight terminal 25 to the outside of the sample chamber. The airtight terminal 25 is held by a terminal holding section 47 which is formed coaxially and integrally with the movable holder 10B and arranged in the same. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
