发明名称 Liquid dispensing system and method
摘要 <p>A system (1) to dispense an aqueous solution to at least one point of use (2), the system comprising a device (3) to dispense the aqueous solution to the at least one point of use (2), the device (3) having at least one pressure vessel (3A,3B,3C) adapted to be charged with a pressurised gas to drive the aqueous solution to the at least one point of use (2) and a humidifier (10) connected to the device to humidify the pressurised gas to at least inhibit the pressurised gas from evaporating moisture from the aqueous solution. <IMAGE></p>
申请公布号 EP0919329(B2) 申请公布日期 2007.01.03
申请号 EP19980309557 申请日期 1998.11.23
申请人 THE BOC GROUP, INC. 发明人 POZNIAK, PETER M.;TRANG, DUY KHANH;ROBERTS, BENJAMIN R
分类号 F04F1/06;B24B37/04;B24B57/02;H01L21/304 主分类号 F04F1/06
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