| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of selectively facilitating physical and chemical modification on specific sites only of recessed parts or protruded parts among structures having ruggedness manufactured by a nano-imprint technology. SOLUTION: An original board having a ruggedness is pressed against a polymer substrate composed of two layers having at least chemical compositions different from each other and, thereby, a second layer from the surface which is hidden by the uppermost surface layer heretofore is visualized as a cross-section of a pillar part. The site-specific chemical modification of a pillar can be performed by forming the second layer with a chemically desirable composition or by chemically modifying a cross-section of the second layer after formation of the pillar. COPYRIGHT: (C)2007,JPO&INPIT |
