发明名称 |
Neural network for determining the endpoint in a process |
摘要 |
There is provided a system and method for pattern recognition of an endpoint curve for a dry etch process. The system trains a neural network with a group of training curves corresponding to the dry etch process, wherein the training curves contain normal and abnormal features. The system receives an endpoint curve at the neural network representing a dry etch process and detects an abnormal feature in the endpoint curve.
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申请公布号 |
US7403930(B2) |
申请公布日期 |
2008.07.22 |
申请号 |
US20060646205 |
申请日期 |
2006.12.27 |
申请人 |
MACRONIX INTERNATIONAL CO., LTD. |
发明人 |
HO TSUNG-HSUAN |
分类号 |
G06E1/00;G05B23/02;G06E3/00;G06F15/18;G06G7/00;H01L21/66 |
主分类号 |
G06E1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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