Ultra-high resolution pixel electrode arrangement structure and signal processing method

摘要

When a semiconductor sensor element used for detecting high-energy x-rays and gamma rays and an amplifier are connected via wires, the capacitances vary depending on the wires, thereby causing a sensitivity variation. To solve this, a structure for making the capacitances uniform is proposed. If a staggered arrangement is used for high resolution, the capacitances by wiring are different from element to element, so dummy sensor mounting sections ( 2 ) are provided to electrode sections ( 3 ) to make the capacitance uniform. The width of the connection section is decreased depending on the wiring length so as to make the capacitance uniform.