| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck and its manufacturing method, which can improve the connection strength between a ceramic base body which causes less damage by plasma and an electrostatic electrode. <P>SOLUTION: The electrostatic chuck is provided with the ceramic base body 11 containing an alumina and a first flux, the electrostatic electrode 12 built in the ceramic base body 11, and ceramic materials 13, 14 containing a second flux between the ceramic base body 11 and the electrostatic electrode 12 and in contact with the ceramic base body 11 and the electrostatic electrode 12. The content of the second flux contained in the ceramic materials 13, 14 is made higher than the content of the first flux contained in the ceramic base body 11. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
