METHOD OF MANUFACTURING MOLD FOR FORMING FILM, METHOD OF FORMING MAIN POLE LAYER IN PERPENDICULAR MAGNETIC RECORDING HEAD, AND PERPENDICULAR MAGNETIC RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording head with improved writability and a sharper neck transition having a main pole layer including a yoke that has vertical sidewalls and a write pole that has inclined sidewalls.

SOLUTION: An insulation layer mold frame has a negative differential bevel angle dBA by employing a two-mask process. A first photoresist layer is patterned and etched to form a rectangular trench 37 in an insulation layer 31 formed of alumina. A second photoresist layer is patterned into a yoke shape opening that is partially superimposed over the rectangular trench 37. After a second RIE process, the yoke opening adjoins the trench 37 at a neck transition point along each long trench side. The volume of a magnetic material in the yoke adjacent to the neck is thereby maximized. The dimension control of the main pole layer can be conducted independently of ABS positioning errors.

COPYRIGHT: (C)2009,JPO&INPIT