发明名称 Phase-change memory device using Sb-Se metal alloy and method of fabricating the same
摘要 Provided are a phase-change memory device using a phase-change material having a low melting point and a high crystallization speed, and a method of fabricating the same. The phase-change memory device includes an antimony (Sb)-selenium (Se) chalcogenide SbxSe100-x phase-change material layer contacting a heat-generating electrode layer exposed through a pore and filling the pore. Due to the use of SbxSe100-x in the phase-change material layer, a higher-speed, lower-power consumption phase-change memory device than a GST memory device can be manufactured.
申请公布号 US7547913(B2) 申请公布日期 2009.06.16
申请号 US20060063991 申请日期 2006.08.30
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 YOON SUNG MIN;LEE NAM YEAL;RYU SANG OUK;LEE SEUNG YUN;PARK YOUNG SAM;CHOI KYU JEONG;YU BYOUNG GON
分类号 H01L29/08 主分类号 H01L29/08
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