TRANSFER METHOD AND ATTACHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an attaching device for attaching a substrate and a support body capable of preventing an attaching layer for attaching the substrate and the support body from being unintendedly softened.SOLUTION: A lamination body (40) is directly handed over from a first robot arm (10) that conveys the lamination body (40) from an attaching room (7) to an overlapping room (6) to a second robot arm (4) that conveys the lamination body (40) from the overlapping room (6) to an outside.SELECTED DRAWING: Figure 1