| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device with which it is possible to reduce the possibility of a reduction in measurement accuracy even when the holder of an inspection chip stops apart from a prescribed measurement position.SOLUTION: The inspection device comprises a light source unit 71, a main shaft motor, a stepping motor, a holder 61, and a measurement-use optical sensor 72. The light source unit 71 is provided with a light-emitting diode 73, an aperture plate 714 in which an aperture 715 is formed, and a lens 716, and the holder 61 is provided with an aperture plate 69 in which an aperture 694 is formed. The width Dof light outputted from both ends of the light emission surface 73A of the light-emitting diode 73 and passing through the focal point of the lens 716 is smaller than the opening diameter Dof the aperture 715, and the Dthat is the opening diameter of the aperture 694 is smaller than a value of the opening diameter Dof the aperture 715 minus the width Dof light.SELECTED DRAWING: Figure 8 |
