APPARATUS AND METHOD FOR FORMING FILM

摘要

Provided is a film forming apparatus which is excellent in the film formation rate and is useful for performing mist CVD. A film forming apparatus includes an atomization/droplet-formation unit for turning a raw-material solution into a mist or droplets a raw-material solution, a carrying unit for carrying the mist or droplets generated in the atomization/droplet-formation unit onto a base using a carrier gas, and a film forming unit for treating the mist or droplets with heat to form a film on the base. The film forming unit is cylindrical or almost cylindrical and has an inlet for introducing the mist or droplets in a side surface thereof so that the mist or droplets is swirled to generate a swirling flow. And the film forming unit has an exhaust outlet in a top surface thereof.

主权项

1. A film forming apparatus comprising:
an atomization/droplet-formation unit for turning a raw-material solution into a mist or droplets; a carrying unit for carrying the mist or droplets generated in the atomization/droplet-formation unit onto a base using a carrier gas; and a film forming unit for treating the mist or droplets with heat to form a film on the base, wherein the film forming unit comprises means configured to swirl the mist or droplets for generating a swirling flow.