PROCESS GAS SUPPLIER

摘要

A process gas supplier includes an outer tube providing a passage for a first process gas, a first inner tube in the outer tube and providing a passage for a second process gas, a gas reactor at an upper part of the outer tube, accommodating a metal source and generating a third process gas by a reaction between the second process gas and the metal source, a second inner tube in the outer tube and providing a passage for the third process gas, a third inner tube in the outer tube and providing a passage for a fourth process gas, a first gas injector supplying the first process gas to a processing space outside the outer tube, a second gas injector supplying the third process gas to the processing space, and a third gas injector supplying the fourth process gas to the processing space.

主权项

1. A process gas supplier comprising:
an outer tube providing a passage for a first process gas; a first inner tube located in the outer tube and providing a passage for a second process gas; a gas reactor located at an upper part of the outer tube, accommodating a metal source and generating a third process gas by a reaction between the second process gas and the metal source; a second inner tube located in the outer tube and providing a passage for the third process gas; a third inner tube located in the outer tube and providing a passage for a fourth process gas; one or more first gas injectors supplying the first process gas flowing in the outer tube, to a processing space outside the outer tube; one or more second gas injectors supplying the third process gas flowing in the second inner tube, to the processing space; and one or more third gas injectors supplying the fourth process gas flowing in the third inner tube, to the processing space.