| 摘要 |
PURPOSE: To provide a heat type infrared detector having a beam of optimum length minimizing temperature resolution according to the size of pixels. CONSTITUTION: On a substrate 1 provided with a readout circuit, pixels each having a diaphragm 2 including a bolometer thin film and two beams 3 supporting the diaphragm 2 at an interval with the substrate 1 are arrayed. Each beam 3 is provided with a wire 6 for connecting the bolometer thin film and readout circuit together. The length of the beam 3 is given by the beam length index obtained by dividing the length of the beam 3 by a quarter of the peripheral length of a pixel. The beam length index is given by an approximate expression including as a parameter a pixel pitch found corresponding to the kind of a stepper used to pattern the pixels and the heat conductivity of the material of the wire 6.
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