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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH01258460(A)
申请公布日期
1989.10.16
申请号
JP19880086894
申请日期
1988.04.08
申请人
MATSUSHITA ELECTRON CORP
发明人
CHIMURA MORIYUKI
分类号
H01L21/822;H01L27/04
主分类号
H01L21/822
代理机构
代理人
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