Cooling apparatus

摘要

To provide cooling apparatus for cooling a workpiece or sensor down to the region of the melting point of helium where it is not necessary to pre-cool the inside of the apparatus using liquid nitrogen etc., and where the time and trouble involved in performing the cooling can be omitted. Rather than providing a storage tank for liquid helium within the vacuum chamber, a liquid helium introduction port is provided taking into consideration heat insulation. A liquid helium container and the port are then connected by vacuum heat insulating piping so that liquid helium is supplied directly from the container.