| 摘要 |
PURPOSE: To provide a fluid passage to the inside of a tubular pole from the inside of a vacuum chamber by arranging a pair of flexible hoses which are respectively connected between first/second side holes and first/second vacuum ports and have sufficient rigidity to control a movement of a base member to the tubular pole. CONSTITUTION: A first/second vacuum ports 28 arranged at a distance penetrate through a thickness of a base member 12, so that a surrounding thing of these two ports can be known as the annular root parts 30, 32. Flexible bellows-shaped hoses 34, 36 respectively cover these root parts 30, 32 so that the other end part is connected to the similar annular root part 38 passing through the wall part of an annular connecting member 40. These hoses 34, 36 are desirably reinforced by a spiral wire, and are made of a flexible plastic material having sufficient hardness to restrict or adjust the base member 12 from flapping with regard to a pole. |
