发明名称 PASTE COATING METHOD
摘要 PURPOSE:To comply with the bonding operation of pellets of various sizes without a need for many kinds of nozzle assembly bodies and by shortening the changeover operation time of types. CONSTITUTION:At a paste coating method, a paste which has been housed in a paste container 12 is discharged from a discharge nozzle 13 installed at said paste container 12 and a substrate 14 is coated with the paste. At the method, while the discharge nozzle 13 is being moved in the X-Y direction at a prescribed coating level at the upper part of the substrate 14, a paste coating operation by means of said discharge nozzle 13 is performed.
申请公布号 JPH04276634(A) 申请公布日期 1992.10.01
申请号 JP19910061041 申请日期 1991.03.04
申请人 TOSHIBA SEIKI KK 发明人 OKUYAMA YUTAKA
分类号 H01L21/52 主分类号 H01L21/52
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