| 摘要 |
PROBLEM TO BE SOLVED: To improve the superposing accuracy by providing means for parallel moving the optical axis of a light which passes through a mask. SOLUTION: The light of a mercury lamp radiated from a light source 1 is converted into parallel beams via a condenser lens 2, the beams pass through a reticle 3, and then the pattern on the reticle 3 is contraction projected on a wafer 8 on an X-Y stage 5 via a contraction projecting lens 4 to be exposed. In this case, a quartz plate 7 is disposed between the reticle 3 and the lens 4 so as to substantially intersect an optical axis 6. The angle formed between the plate 7 and the axis 6 is varied in the directions X and Y. When the beams enter the plate 7, the beams are refracted and emitted at the same angle as the incident angle, and hence the axis 6 can be parallel moved at a desired amount by varying the angle formed between the plate 7 and the axis 6. Thus, the superposing accuracy can be improved. |
