发明名称 Method for forming conductor members, manufacturing method of semiconductor element and manufacturing method of thin-film magnetic head
摘要 A method for forming conductor members includes a step of coating an organic solvent on a conductive film to form an organic solvent layer, a step of coating a resist material on the organic solvent layer to form a resist layer, a step of patterning the resist layer to form a patterned resist layer, and a step of plating a conductive material using the patterned resist layer to form the conductor members.
申请公布号 US2001027013(A1) 申请公布日期 2001.10.04
申请号 US20010802913 申请日期 2001.03.12
申请人 TDK CORPORATION 发明人 TSUTSUI TOMOHIRO
分类号 C25D7/12;G11B5/31;H01B13/00;H01L21/288;H01L21/768;H05K3/18;H05K3/24;(IPC1-7):H01L21/44;H01L21/476 主分类号 C25D7/12
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