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发明名称
CVD SYSTEM
摘要
申请公布号
KR100244956(B1)
申请公布日期
2000.02.15
申请号
KR19960012330
申请日期
1996.04.23
申请人
ANELVA CORPORATION
发明人
MIZUNO, SHIGERU;ISHIHARA, MASAHITO;TAGAMI, MANABU;SAHASE, HAJIME;TAKAHASHI, NYUKI
分类号
C23C16/44;C23C16/448;C23C16/455;C23C16/458;H01L21/205;H01L21/285;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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