FOREIGN MATTER CONTAMINATION PREVENTION CONVEYING BELT

摘要

PROBLEM TO BE SOLVED: To provide a conveying belt to prevent contamination of the back of an object to be conveyed and applicable to an existing manufacturing process. SOLUTION: The surface, positioned opposite to a pulley 2, of a belt 3 is formed in an arcuate shape in cross section in a manner to be contained in the arcuate groove part of the pulley 2 and applicable to an existing manufacturing process. The surface, opposite to an object 4 to be conveyed, of the belt 3 is formed such that a plurality of protrusions are formed along the longitudinal direction of the belt 3 and prevent the object 4 to be conveyed from making direct surface contact with the belt 3 to prevent the occurrence of contamination by a foreign matter. An overhang part making contact with the outer peripheral part of the pulley 2 is formed at the belt 3 and prevents the occurrence of a twist. Urethane being excellent in durability is used as a belt material. Flexibility thereof can be improved by being provided with grooves or hollow parts in longitudinal direction thereof. The tip of the protrusion is formed in a shape that a chipping hardly occurs or a different substance may be attached. The belt 3 is suitable for a use to a wafer conveying device or the like.