| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge lamp lighting method in which the discharge delay is improved (the discharge starting time is shortened) in the pulse lighting of the rare gas lamp, and the discharge device. SOLUTION: The DC power source 1 outputs a DC voltage by inputting the power supply switch 10 and the inverter circuit 2 outputs a pulse voltage of the frequency of 10 kHz-100 kHz from this DC voltage. This pulse voltage is boosted by a booster transformer 6 and a pulse voltage of a peak voltage of 200-5,000 V is outputted to the secondary side. And a circuit is structured so that this pulse voltage is supplied between the electrodes of the rare gas lamp. To this circuit, a discharge pulse impressing circuit 9 in which a capacitor 7 that impresses a discharge pulse voltage of a half-value width of pulse of 0.1μsec-10μsec on the electrodes of the rare gas lamp 3 for 100μsec-5 see after inputting the DC power supply switch 10 and a switching element 8 are connected in series, is connected. |
