发明名称 CANTILEVER FOR PERPENDICULAR SCANNING MICROSCOPE AND PROBE FOR PERPENDICULAR SCANNING MICROSCOPE USING THIS CANTILEVER
摘要 PROBLEM TO BE SOLVED: To provide a probe for perpendicular scanning microscope which can supersensitively detect surface information of a sample by a nano-tube tip as a probe standing approximately perpendicular to the sample surface. SOLUTION: The probe for the perpendicular scanning microscope in this invention is features like this: in a probe 20 for the perpendicular scanning microscope which obtains physical property information of a sample surface 24 by the tip of the nano-tube probe adhered in a cantilever 2, a mounting area where a base edge 14 of the nano-tube 12 is adhered is formed; when the cantilevers 2 is placed in measurement condition for an average sample surface 26, it is formed so that the height direction of the mounting area becomes approximately perpendicular to the average sample surface 26 and the base edge 14 of the nano-tube 12 is adhered in height direction of the mounting area.
申请公布号 JP2002162335(A) 申请公布日期 2002.06.07
申请号 JP20000403558 申请日期 2000.11.26
申请人 NAKAYAMA YOSHIKAZU;DAIKEN KAGAKU KOGYO KK;SEIKO INSTRUMENTS INC 发明人 NAKAYAMA YOSHIKAZU;AKITA SEIJI;HARADA AKIO;OKAWA TAKASHI;TAKANO YUICHI;YASUTAKE MASATOSHI;SHIRAKAWABE YOSHIHARU
分类号 G01Q60/16;G01Q60/32;G01Q60/38;G01Q70/10;G01Q70/12;(IPC1-7):G01N13/16;G12B21/04;G01N13/12;G12B21/08 主分类号 G01Q60/16
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