| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved temperature control system and method to be used for a manufacturing process such as a semiconductor manufacturing process and equipment. SOLUTION: In this inertial temperature control method, the temperature of a main body housed in a heating chamber in a furnace whose temperature is controlled is changed from a start temperature to an end temperature. At least one controllable heating element and at least one temperature detecting device are housed in the heating chamber of the furnace. A changing temperature set point is applied to the temperature control algorithm. This set point temperature is accelerated at a finite speed from the start temperature to the end temperature until the temperature incline speed reaches the defined maximum incline speed. The maximum incline speed is substantially maintained until the set point temperature approaches the end temperature. Then, the set point temperature is decelerated at the finite speed from the maximum incline speed, and led to the end temperature. The temperature control algorithm is substantially maintained so as to be matched with the set point temperature given with the temperature of the main body.
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