METHOD AND APPARATUS FOR MANUFACTURING GAS MIXTURE AND METHOD FOR CALIBRATING GAS ANALYZING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a gas mixture and a method for calibrating a gas analyzing apparatus which can prepare the gas mixture with a volatile component of known concentration used for a calibrating reference or an industrial process in the range of very low concentration on-line. SOLUTION: The apparatus for manufacturing the gas mixture containing at least one gas trace component with the predetermined concentration has a matrix gas supplying source 1 having a mass flow controlling apparatus 8 downstream, at least one component supplying source 2 and a measuring apparatus 3 for measuring at least one trace component. The measuring apparatus 3 is a micro drop measuring apparatus having at least one nozzle 4. The nozzle 4 continuously emits the micro drops, has an opening in a vaporizing pipe 6 that the matrix gas flows, and can be contracted by a piezoelectric element 16 operated by measuring pulses generated in response to an intended transmitting quantity per unit time so as to create the micro drops.