X-RAY GENERATOR AND EUV EXPOSURE DEVICE

摘要

X-rays are condensed by a condensing mirror (3) into condensed light (4) and shaped by a pinhole plate (5) having a cooling mechanism. The pinhole plate (5) has an annular Peltier element (9) connected thereto. Attached to the rear stage of the Peltier element (9) is a cooling block (10) in which a cooling medium flows. The cooling block (10) is cooled by the cooling medium. The Peltier element (9) has a cool junction on the pinhole plate (5) side and a hot junction on the cooling block (10) side, the cool junction cooling the pinhole plate (5), with the heat discharged from the hot junction to the cooling block (10). The pinhole in the pinhole plate (5) is positioned at the light condensing point for the condensed light (4) and performs the function of controlling the throughput of illuminating light to an exposure device and maintaining the exposure device (13) including the illuminating system and projection system at a high degree of vacuum.