发明名称
摘要 <p>A temperature control simulation method and apparatus for forming a temperature system simulation model on a computer, provide substantially the same response or simulation characteristics as a temperature change in an actual furnace, whereby a temperature control algorithm can be developed and the method or manner of manipulating the temperature control can be learned without using an actual furnace. A transfer function is determined which represents a relationship between a heater input and a temperature output. A temperature control simulation for a heating furnace is executed using the transfer function of a heating furnace as a transfer function that a temperature system simulation device uses.</p>
申请公布号 JP3219245(B2) 申请公布日期 2001.10.15
申请号 JP19980228770 申请日期 1998.08.13
申请人 发明人
分类号 H01L21/22;G05D23/00;G05D23/19;G06F17/00;G06F19/00;G06G7/48;G06G7/66;G06Q50/00;G06Q50/04;H01L21/00;(IPC1-7):H01L21/22 主分类号 H01L21/22
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