| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical element polishing method which minimizes polishing flaws and also minimizes latent flaws formed in a washing step of a post-process. <P>SOLUTION: According to the method, polishing of the optical element is carried out by using a polishing solution which is diluted by ionic water obtained by electrolizing water. Herein the ionic water for use in polishing is pH 10.3 or more. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
