发明名称 SYSTEM FOR TREATING EXHAUST GAS
摘要 <P>PROBLEM TO BE SOLVED: To provide an exhaust gas treatment system which can treat a hazardous gas with a small amount of energy and efficiently. <P>SOLUTION: The exhaust gas treatment system comprises a diluted gas supply device for diluting an introduced harmful exhaust gas at a concentration of not more than an explosion limit, a device for making harmless including a heater and a heater controller, and making the diluted harmful exhaust gas harmless by catalytic activity, and a monitor for monitoring a total flow amount of the diluted gas, wherein information on flow amount data on the diluted gas is fed back to the heater controller and the temperature of a catalyst is controlled corresponding to the amount of the inflow of the diluted gas flowing into the device for making harmless. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006223930(A) 申请公布日期 2006.08.31
申请号 JP20050037530 申请日期 2005.02.15
申请人 TOSHIBA CORP 发明人 CHIBANA MASARU
分类号 B01D53/86;H01L21/3065 主分类号 B01D53/86
代理机构 代理人
主权项
地址